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研制了一种由环形波导腔环绕直径３０ｃｍ、高５０ｃｍ耐热玻璃圆筒真空室构成的新的大面积微波等离子体源。环形波导内侧开有多个用来激励产生等离子体的狭缝，相邻狭缝间的距离为半个波导波长。利用该装置研究了微波功率、工作气体对氩等离子体特性的影响。静电双探针测量结果表明，当气压在４０－６００Ｐａ，功率在２００－６００Ｗ范围内时，电子温度可达０．８－３．０ｅＶ，离子密度最高达４．３×１０１０ｃｍ－３。
A new large-area microwave plasma source with a diameter of 30cm and a height of 50cm heat-resistant glass cylinder vacuum chamber was developed. The inner side of the annular waveguide is provided with a plurality of slits for exciting the plasma generation, and the distance between the adjacent slits is half the wavelength of the waveguide. Using this device, the influence of microwave power and working gas on the characteristics of argon plasma was studied. Electrostatic double probe measurements show that when the pressure is in the range of 40-600Pa and the power is in the range of 200-600W, the electron temperature can reach 0.8-3.0eV and the ion density can reach as high as 4.3x1010cm-3.