论文部分内容阅读
原子力显微术是微纳米尺度实空间形貌成像与结构表征的关键技术之一。近些年,原子力显微术衍生发展出了一系列令人瞩目的功能化探测模式和新技术。文章从以下两个方面论述了原子力显微术的前沿进展:(1)原子力显微术的功能化探测模式及其在微纳米尺度物性研究与测量以及微纳加工等领域的应用;(2)原子力显微术自身在更高精度、更高分辨率、更快速度、更多功能等方面的进展及在基础和应用研究领域中的应用。文章还展望了原子力显微术的下一步发展方向和正在不断扩展的研究领域。
Atomic force microscopy is one of the key technologies for imaging and structural characterization of real nanostructures in real space. In recent years, atomic force microscopy derived a series of remarkable functional detection mode and new technology. The article discusses the forefront advances of AFM from the following two aspects: (1) the functionalized detection mode of AFM and its application in micro-nano-scale physical properties research and measurement and micro / nano processing; (2) Atomic force microscopy in its own higher precision, higher resolution, faster speed, more functions and other aspects of progress and application in basic and applied research. The article also looks forward to the next development direction of atomic force microscopy and the expanding field of research.