以溶胶－凝胶法制备了稀土铽或镝掺杂的钴尖晶石铁氧体纳米晶薄膜．考察了Ｔｂ或Ｄｙ的掺杂量及晶化条件对晶相的影响．结果表明，稀土离子的掺杂量ｘ超过０．３时，样品很难形成尖晶石单相．原子力显微镜对纳米晶薄膜表面形貌的观测显示，溶胶－凝胶法制备的薄膜粒度可控制在２０～５０ｎｍ，且具有较高的表面平整度．对于厚度为２００ｎｍ的薄膜，均方根粗糙度仅为４～５ｎｍ．磁特性研究发现，掺杂Ｔｂ或Ｄｙ的样品矫顽力明显提高 The rare earth terbium or dysprosium-doped cobalt spinel ferrite nanocrystalline thin films were prepared by sol-gel method. The effects of the doping amount of Tb or Dy and the crystallization conditions on the crystal phase were investigated. The results show that it is difficult to form spinel single phase when the doping amount of rare earth ions x exceeds 0.3. The observation of the surface morphology of the nanocrystalline films by atomic force microscopy showed that the size of the films prepared by sol - gel method can be controlled at 20 ~ 50 nm with high surface flatness. For films with a thickness of 200 nm, the root mean square roughness is only 4 to 5 nm. Magnetic properties of the study found that Tb or Dy-doped samples significantly increased the coercivity