ZnO thin films are grown on monocrystalline silicon by laser molecular-beam epitaxy.Silver quantum dot arrays as surface enhanced Raman scattering substrates are prepared on the surface of ZnO films by magnetron sputtering.Surface enhanced Raman spectra of ZnO films modified with silver quantum dots are recorded.Surface enhanced Raman spectra image and 378 cm-1 vibration intensity mapping image of Raman peak of ZnO thin films modified with silver quantum dots are obtained.It is indicated that Raman intensity is enhanced immensely on the surface of ZnO films nearby silver quantum dots.It is well known that Raman signals of nano films,nano particles or nano wires are very weak,which limits the applied range of Raman on the nano materials. It is an efficient method that expends Raman field of applications on nano scale materials by modifying with silver quantum dots on the surface.