半导体器件寿命的长短,电参数是否稳定可靠,器件密封好坏是关键因素之一。装管芯之前,把有微小漏的管壳剔除,可以避免管芯的浪费。为此,我们制作了一台和氦质谱检漏仪联用的半导体管壳半自动检漏台,经过一年多的实际应用证明,它适用于半导体管壳或器件的批量检漏筛选。一、半自动检漏台的结构及工作原理 1.真空系统如图1所示。各电磁阀之间用铜法兰盘和φ12毫米的铜管连接。四个真空电磁阀门组成自动循环系统,两个检漏头①和②(图2)交替进行工作。在检漏头①和②上都装好待检的管壳,接通电源,阀门2、3、4关闭,阀门1开,机械泵对检漏头①抽气。当抽到规定的真空度后,推动一下台面上的板键开关,阀门1关闭, The length of the life of semiconductor devices, electrical parameters are stable and reliable, the device is good or bad seal is one of the key factors. Before loading the die, removing the case with a slight leak can prevent the die from being wasted. To this end, we have made a semiautomatic leak detector with a helium mass spectrometer leak detector. After more than a year of practical application, we have found that it is suitable for the batch leak detection of semiconductor tubes or devices. First, the semi-automatic leak detection station structure and working principle 1. Vacuum system shown in Figure 1. Between the solenoid valve with copper flange and φ12 mm copper connection. Four vacuum solenoid valves form an automatic circulation system, two leak detection head ① and ② (Figure 2) work alternately. In the leak detection ① and ② are installed on the tube to be tested, connected to the power, the valve 2, 3, 4 closed, the valve 1 open, the mechanical pump on the leak detector ① exhaust. When pumping the required degree of vacuum, push the plate on the table key switch, the valve 1 is closed,