论文部分内容阅读
短波紫外激光是指波长介于200~300 nm的紫外激光,在微电子、微机械、光存储、精细标记等领域具有重大的应用价值。提出了全新技术途径,开发了高功率高光束质量全固态1.1μm Nd:YAG激光器和性能优良的CBO非线性光学晶体。全固态1.1μm激光器采用大功率LD侧面泵浦Nd:YAG激光晶体,通过精密谱线选择技术,获得高功率高光束质量1112 nm和1123 nm基频激光;再通过非线性光学晶体LBO及CBO,实现高效率二倍频及四倍频激光产生,从而获得高功率短波紫外激光、首次在理论上研究了利用CBO晶体获得1112 nm和1123 nm为基频激光的四次谐波产生性能,分析了CBO晶体实现高功率短波紫外激光的可行性;实验方面,首次获得了四次谐波278 nn及281 nm高功率短波紫外激光,它们的输出功率分别达到1.5 W和1.3 W。
Shortwave ultraviolet laser is a UV laser with a wavelength between 200 and 300 nm, which has great application value in the fields of microelectronics, micromachining, optical storage and fine marking. A new technology approach is proposed. The high power and high beam quality solid state 1.1μm Nd: YAG laser and the excellent CBO nonlinear optical crystal are developed. All-solid-state 1.1μm laser adopts high-power LD side-pumped Nd: YAG laser crystal and high-power and high-beam quality 1112 nm and 1123 nm fundamental laser beams are obtained through precise spectral line selection. Then, through the nonlinear optical crystals LBO and CBO, To achieve high efficiency double frequency and quadruple frequency laser generation, to obtain high power shortwave UV laser, for the first time in theory to study the use of CBO crystals to obtain the 1112 nm and 1123 nm as the fundamental frequency laser fourth harmonic generation performance is analyzed For the first time, the fourth harmonic 278 nn and 281 nm high-power shortwave UV lasers were obtained, and the output power of CBO crystals reached 1.5 W and 1.3 W, respectively.