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篇名 (期号 /页码 ) (1)伪火花放电开关的实验研究 (12 / 12 2 7) (2 )热激励微梁谐振器的温度分布和谐振振幅 (6 / 5 92 ) (3)单晶硅晶圆晶向的精确标定方法 (5 / 5 2 8) (4)超大规模集成电路金属互连线的电迁移过程指示参量研究 (10 / 10 6 2 ) (5 )等静
Experimental Study of Pseudo Spark Discharge Discharge (12/12 2 7) (2) Temperature Distribution and Resonance Amplitude of Thermally Excited Micro-Beam Resonator (6/5 92) (3) Single (5/5 2 8) (4) Indicating parameters of electromigration process of metal interconnects in VLSI (10/10 6 2) (5) Isostatics