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提出一种利用光频梳和可调谐半导体激光器提高台阶高度测量准确度的方法.通过将可调谐激光器锁定至光频梳,可对激光器的输出波长进行精确锁定与测量.基于可调合成波长链原理,利用锁定后的半导体激光器构建了一套台阶高度测量方案,该方案可消除合成波长误差对台阶高度测量不确定度的影响.采用一台可调谐半导体激光器和光频梳进行了5000 s的连续锁定实验,结果表明,锁定后的可调谐半导体激光器的频率稳定度达1.8×10~(-12).该方法的理论测量不确定度约为7.9 nm,且测量结果可溯源至时间频率基准.
A method for improving the height measurement of step height using an optical frequency comb and a tunable semiconductor laser is proposed. The laser output wavelength can be accurately locked and measured by locking the tunable laser to the optical frequency comb. Principle, a set of step height measurement scheme is constructed by using a locked semiconductor laser, which can eliminate the effect of the synthetic wavelength error on the measurement uncertainty of the step height. A tunable semiconductor laser and an optical frequency comb were used for a continuous 5000 s The experimental results show that the frequency stability of the locked tunable semiconductor laser reaches 1.8 × 10 ~ (-12). The theoretical measurement uncertainty of this method is about 7.9 nm, and the measurement results can be traceable to the time-frequency reference.