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用HFCVD法在硬质合金（ YG6）刀具衬底上沉积金刚石薄膜，用氢微波等离子体刻蚀的方法 对衬底进行表面预处理， 研究了该预处理技术对 WC硬质合金衬底表面成分的影响。 进一步探 讨了所沉积金刚石薄膜的表面形貌和附着力，并通过难加工材料实际切削试验，研究了所制备的金刚石薄膜涂层刀具的切削性能。试验结果表明，Ar－H2微波等离子体刻蚀脱碳处理是提高金刚石薄膜附着力和改善涂层刀具切削性能的有效预处理方法。
A diamond thin film was deposited on the YG6 tool substrate by HFCVD and the surface was pretreated by hydrogen microwave plasma etching. The effect of the pretreatment on the surface composition of the WC hardmetal substrate Impact. The surface morphology and adhesion of the deposited diamond films were further investigated. The cutting performance of the prepared diamond thin film coated cutting tools was studied by actual cutting experiments of difficult-to-process materials. The experimental results show that the Ar-H2 microwave plasma etching decarburization is an effective pretreatment method to improve the diamond film adhesion and improve the cutting performance of the coated tool.