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研究了 Al N陶瓷高温氧化对金属化结合强度的影响。在 80 0℃、 10 0 0℃、 12 0 0℃和 140 0℃下对 Al N基片进行了高温处理 ,并用 XRD和 SEM分析了氧化结果。从 12 0 0℃开始 ,基片表面有较明显的氧化 ,140 0℃时 ,基片内部氧化明显。在氧化后的 Al N基片上金属化布线 ,发现表面轻微氧化的 Al N基片和金属化强度有一些提高 ,但氧化过度 ,反而会使金属化结合强度大幅度下降。
The effect of high temperature oxidation of Al N ceramics on the bonding strength of metallization was studied. The AlN substrate was heated at 80 0 ℃, 100 ℃, 1200 ℃ and 140 ℃, and the oxidation results were analyzed by XRD and SEM. From 1200 ℃, the surface of the substrate has a more obvious oxidation, 140 ℃, the substrate oxidation was obvious. AlN substrate in the oxide after the metal wiring, found that the surface slightly oxidized Al N substrate and the metal strength is somewhat improved, but the oxidation, but will greatly reduce the metallization bonding strength.