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本文运用气体放电理论,对双层辉光离子渗金属工艺条件下,气体的电离度,离子轰击能量及密度、辉光放电功率耗散等方面的一些问题进行了分析与计算。
In this paper, the gas discharge theory is used to analyze and calculate some problems in the process of double glow ion infiltration metal such as gas ionization, ion bombardment energy and density, glow discharge power dissipation.