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利用X射线衍分析射仪、慢正电子湮没技术和扫描电镜对Mo衬底上钛膜吸氘或注入氘前后的微观结构进行表征。结果表明:吸附氘改变了钛膜物相结构,注入氘未改变钛膜的物相结构;原始钛膜和吸附氘后的钛膜中缺陷分布均匀,吸附氘增加了钛膜缺陷浓度,载能氘粒子的注入对钛膜造成较大损伤;吸附氘对钛膜表面形貌无影响,由于选择性烧蚀,注入氘后钛膜表面不均匀性降低。
The microstructure of the Ti film on Mo substrate before and after deuterium absorption or deuterium implantation was characterized by X-ray diffraction analyzer, slow positron annihilation technique and scanning electron microscopy. The results show that the adsorption of deuterium changes the phase structure of the titanium film, and the deuterium does not change the phase structure of the titanium film. The defect distribution of the original titanium film and the titanium film after the deuterium adsorption is uniform, and the deuterium adsorption increases the defect concentration of the titanium film. Deuterium particles cause greater damage to the titanium film; adsorption of deuterium has no effect on the surface morphology of the titanium film, due to selective ablation, the surface of the titanium film is reduced inhomogeneity after deuterium implantation.