在铁磁金属中只有钴具有单轴各向异性和高磁各向异性。以钴基合金薄膜作为高磁性材料已广泛用于储存和记录元件。钴薄膜的制备一般采用真空沉积法、化学镀膜法和射频溅射法等。这些方法各有特点,但制备过程中基片温度较高,沉积速率低,使钴薄膜的实际应用较困难。利用表面波激发微波等离子体技术制备钴薄膜尚未见文献报道。本文采用自制微 Among ferromagnetic metals, only cobalt has uniaxial anisotropy and high magnetic anisotropy. Cobalt-based alloy thin films have been widely used as storage and recording elements for high magnetic materials. The preparation of cobalt thin film generally adopts vacuum deposition method, chemical plating method and radio frequency sputtering method. These methods have their own characteristics, but the preparation of the substrate temperature is high, the deposition rate is low, so that the practical application of cobalt thin film more difficult. The use of surface wave excitation microwave plasma technology for the preparation of cobalt film has not been reported in the literature. This article uses homemade micro