论文部分内容阅读
采用数字化电子光学设计软件计算了扫描电子显微镜 (SEM)物镜的光学特性并能在满足给定的条件下优化物镜设计。本文通过采用已发表的通用数据和用软件计算实际透镜得到的数据来计算电子束斑直径 ,研究非对称透镜物镜的光学特性。德国Tuebingen大学应用物理研究所的一个扫描电子显微镜电子光学系统采用了本文的计算结果
Digital electro-optical design software was used to calculate the optical properties of a scanning electron microscope (SEM) objective and to optimize objective design for a given condition. In this paper, we calculate the electron beam spot diameter by using the published general data and the data obtained by calculating the real lens by software to study the optical characteristics of the asymmetric lens objective. A scanning electron microscope electron optical system at the Institute of Applied Physics, University of Tuebingen, Germany, uses the results of this paper