准分子激光在微机械加工,医学,光通讯中具有重要应用。但由于准分子激光固有的特性,其光束能量具有不均匀性,从而准分子激光的应用受到极大制约, 因此,近年来,关于准分子激光光束能量均匀化的研究方面,人们进行了大量的理论和实验研究。本文概述了国内外准分子激光在光束能量均匀化方面的研究进展。 Excimer lasers have important applications in micromachining, medicine and optical communication. However, due to the inherent characteristics of excimer lasers, the beam energy is inhomogeneous, and the application of excimer lasers is greatly restricted. Therefore, in recent years, there has been a great deal of research on the energy homogenization of excimer laser beams, Theoretical and experimental research. This article summarizes the research progress of the excimer laser at home and abroad in the aspect of beam energy homogenization.