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天光装置是中国原子能科学研究院承担的国家“863”高技术课题,是一套大型的高功率密度、高光束品质的KrF准分子激光系统,本工作研制该装置的测控系统。天光装置测控系统完成以下操作:门连锁;实验室环境条件监测;监视装置的运行状态参数;两台电子束泵浦激光放大器的充电过程;触
Sky Light is a high-tech national “863” project undertaken by China Institute of Atomic Energy. It is a large KrF excimer laser system with high power density and high beam quality. This work developed the measurement and control system of this device. Skylight device monitoring and control system to complete the following operations: door chain; laboratory environmental conditions monitoring; monitoring device operating parameters; two electron beam pump laser amplifier charging process