一、前言三坐标测重机是一种 X、Y、Z 各轴的导轨面相互垂直,利用导轨的直线运动来实现测量目的的计量仪器。在使三坐标测量机测量性能降低的各种因素中,测量机的几何精度、由于运动使载荷分布发生变化而产生的直线运动误差乃是主要原因。随着三坐标测量机的普及和性能的提高,导轨精度对三坐标测量机影响的评定变得日益重要。 I. Introduction CMM is a kind of X, Y, Z axis of the rail surface perpendicular to each other, the use of linear motion guide rail to achieve the purpose of measuring instruments. Of the various factors that have deteriorated CMM performance, the geometric accuracy of the CMM, the linear motion error due to the change in load distribution due to motion, is the main reason. With the popularity of CMM and the improvement of performance, the evaluation of the accuracy of the guide rail on the CMM becomes more and more important.