压电薄膜在微传感器和微致动器方面的应用日益受到重视。薄膜压电性能的测量方法与体材相比有很大不同。本文介绍了几种测量薄膜压电特性的方法，包括：激光干涉仪法，扫描探针显微镜法，垂直加载法等，并比较了这些方法的优缺点。对已有的测量结果进行了简要分析 The application of piezoelectric thin film in micro-sensor and micro-actuator has been paid more and more attention. The measurement of film piezoelectric properties is very different from the material. This article describes several methods for measuring the piezoelectric properties of thin films, including laser interferometry, scanning probe microscopy, vertical loading, etc., and compares the advantages and disadvantages of these methods. The existing measurement results were briefly analyzed