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LMI公司工业传感器研究部新近推出的SLS７０００型镜面反射传感器在１mm测量范围内具有２５０nm的分辨率和１６kHz的采样率（采用一种“快速光控制电路”专利产品），可见激光光斑尺寸为１０μm～２０μm，允许仿形测量复杂目标结构，诸如细小裂纹和沟槽等。该传感器的内置数字
The recently introduced SLS7000 specular reflection sensor from LMI’s Industrial Sensor Research Group has a resolution of 250 nm and a sampling rate of 16 kHz in a 1 mm measurement range (using a patented “Fast Light Control Circuit”), which shows a laser spot size of 10 μm ~ 20μm, allowing profiling measurement of complex target structures, such as small cracks and grooves. The sensor’s built-in numbers