论文部分内容阅读
采用快速热处理和传统热处理工艺对金属有机物热分解法制备的镧钛酸铅（ＰＬＴ）铁电薄膜进行了热处理，用扫描电镜对不同热处理工艺和不同厚度的ＰＬＴ薄膜的形貌进行了分析。结果表明，快速热处理工艺有利于活性高，较薄膜层的结晶和致密化反应；ＰＬＴ薄膜在传统和快速热处理过程中的形成过程与蒸发和溅射薄膜的核生长型薄膜的形成过程相似，薄膜的形成经历了岛状－网状－连续的过程，即随层数的增加，薄膜逐渐从不连续转变为连续，而热处理工艺只影响形成连续薄膜的厚度。
The PLT ferroelectric thin films prepared by the thermal decomposition of metal organic compounds were treated by rapid thermal treatment and conventional heat treatment. The morphology of PLT thin films with different heat treatment processes and different thicknesses was analyzed by scanning electron microscopy. The results show that the rapid heat treatment is beneficial to the crystallization and densification reaction of high activity and thin film layers. The formation process of PLT thin films during the traditional and rapid heat treatment is similar to the formation of the nucleated film of evaporated and sputtered films. The formation of island-like network-continuous process, that is, with the increase of the number of layers, the film gradually changes from discontinuous to continuous, while the heat treatment process only affects the formation of a continuous film thickness.