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光声气体传感器在微量气体探测方面具有许多优势,光声气体传感器的MEMS化可降低成本,提高传感器性能,具有重要的实际意义。依据光声传感器的原理,结合MEMS加工技术,研究制作了一种光声腔,同时,进行了一定的理论模拟,为实现光声气体传感器的MEMS化打下重要基础。
Photoacoustic gas sensor has many advantages in the detection of trace gases. The photoacoustic gas sensor MEMS can reduce the cost and improve the sensor performance, and has important practical significance. According to the principle of photoacoustic sensor, combined with MEMS processing technology, a photoacoustic cavity was researched and manufactured. At the same time, a certain theoretical simulation was carried out, laying an important foundation for the realization of MEMS photoacoustic gas sensor.