论文部分内容阅读
基于差动原理对HF酸恒定化学蚀刻速率法进行改进,以降低环境(温度、HF酸浓度等)变化对测量结果的影响,从而提高测量效率和测量准确性。并将在新方法测量实验后的结果与理论估计值进行了比较分析。
Based on the differential principle, the HF acid constant chemical etching rate method is improved to reduce the influence of the change of environment (temperature, HF acid concentration, etc.) on the measurement result, so as to improve the measurement efficiency and the measurement accuracy. And in the new method of measurement experiment results and theoretical estimates were compared.