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本文系采用透射电镜观察、电子衍射、X射线衍射和电子探针等分析方法,对Cu-Be和Cu-Be-Y二种冷阴极的微观结构进行了综合分析。结果表明:二种冷阴极的表面均为粒状的BeO薄膜,它是冷阴极的二次发射体,此薄膜一旦被轰掉,阴极寿命即终止;BeO薄膜中有少量铜的氧化物,它的存在对二次发射不利;Cu-Be冷阴极表面BeO的粒子粗大、疏松,而Cu-Be-Y冷阴极表面BeO的粒子则细小、致密,这是造成这二种冷阴极在发射性能和寿命上有明显差异的主要原因之一。此外,还发现:在二种冷阴极表面BeO薄膜的下面均有含Be为12％的Cu-Be合金,即金属化合物γ相。
In this paper, the microstructures of Cu-Be and Cu-Be-Y cold cathode were comprehensively analyzed by transmission electron microscopy, electron diffraction, X-ray diffraction and electron probe analysis. The results show that the surface of the two kinds of cold cathode are all granular BeO thin films, which are secondary emitters of cold cathode. Once the thin film is deactivated, the life of the cathode terminates. The small amount of copper oxide in the BeO thin film, The BeO particles on the surface of Cu-Be cold cathode are coarse and loose, while the particles of BeO on the surface of Cu-Be-Y cold cathode are fine and dense, which is the reason that the emission and lifetime One of the major causes of significant differences. In addition, it was also found that Cu-Be alloy containing 12% of Be, ie, the γ phase of the metal compound, was found under the BeO films on both cold cathode surfaces.