本文介绍一种考夫曼型高能宽束强流离子源,它的最高引出电压可达100kV,最大引出束流25mA。可使用氩、氮、氢、氧及一氧化碳等多种气态物质作为工质。在使用氩、氮等非腐蚀性气体工作时,阴极连续工作寿命约为100h。引出束流的束径在0.65m,下游靶区约为100mm。束流稳定性<±3%/h。可用于料材表面进行大面积注氮和进行离子束混合及其它表面改性研究。 This article describes a Kaufman type high energy wide beam strong stream ion source, its maximum extraction voltage up to 100kV, the maximum outgoing beam 25mA. Argon, nitrogen, hydrogen, oxygen and carbon monoxide and other gaseous substances can be used as working fluid. In the use of argon, nitrogen and other non-corrosive gases work, the cathode continuous working life of about 100h. The beam diameter of the outgoing beam is 0.65 m and the downstream target area is about 100 mm. Beam stability <± 3% / h. Can be used for a large area of ​​nitrogen injection material surface and ion beam mixing and other surface modification studies.