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对宽度比对组合沟道结构的牺牲层腐蚀特性的影响进行了研究.从理论和实验两个方面,对不同宽度比的腐蚀特性进行了比较.结果表明,宽度比对窄-宽组合结构和宽-窄组合结构的影响不同.对于窄-宽组合结构,腐蚀过程不仅与宽度比有关,而且与沟道宽度有关.对于宽度比相同的结构,每个阶段的腐蚀速率和腐蚀前端浓度非常接近,每个阶段的腐蚀时间却随沟道宽度的增加而增长.但是,如果宽沟道的长度比较长,总的腐蚀时间非常接近.对于宽-窄组合沟道结构,如果宽度比相同,则包括所需腐蚀时间在内的所有过程完全相同.每个阶段结束时的腐蚀速率和腐蚀前端的浓度随着宽度比的增大而增大,但是总的腐蚀时间随宽度比的增大而下降.
The effects of width ratio on the sacrificial layer corrosion characteristics of the combined channel structure are studied.According to the theoretical and experimental results, the corrosion characteristics of different width ratios are compared.The results show that the width ratio of the narrow- The effect of the wide-narrow composite structure is different. For the narrow-wide composite structure, the corrosion process is not only related to the width ratio but also to the channel width. For the same width structure, the corrosion rate at each stage is very close to the corrosion front concentration , But the corrosion time of each phase increases with the increase of channel width, but the total etch time is very close if the wide channel length is longer.For the wide-narrow combined channel structure, if the width ratio is the same, All processes, including the desired corrosion time, are identical, with the rate of corrosion and the concentration of the front end of the etch increasing with increasing width ratio at the end of each stage, but the total corrosion time decreases with increasing width ratio .