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按照透射电镜对真空系统的控制要求与真空系统的构成,采用集散控制的思想,建立了以PLC为底层核心控制器,组态王作为集中管理软件的控制系统。上位机组态软件通过以太网与下位PLC进行通讯与数据交换,实现了较为完备的透射电镜真空系统的控制,该系统已投入使用,真空度符合要求,运行效果良好。
According to the control requirements of vacuum system and the structure of vacuum system by TEM, the idea of distributed control was adopted to establish the control system with PLC as the underlying core controller and Kingview as the centralized management software. PC configuration software through the Ethernet communication with the lower PLC for data exchange, to achieve a more complete transmission electron microscopy vacuum system control, the system has been put into use, the degree of vacuum to meet the requirements, running well.