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电荷耦合器件(CCD)是成像系统的关键器件,CCD器件的点扩展函数(PSF)是整个成像系统PSF的重要部分。采用背部入射、部分耗尽CCD,分析了载流子在CCD中的运动过程,推导了计算CCD的PSF的解析公式。对CCD进行物理建模,用蒙特-卡罗方法进行粒子跟踪模拟计算得到了PSF,并能和解析公式计算得到的PSF很好的吻合。系统分析计算了CCD的主要特性参数,如响应度、线性度和调制传递函数(MTF)等。模拟研究了入射光波长和CCD自由层宽度对CCD的PSF的影响,结果表明较窄自由层宽度和长波易得到较好的PSF。
Charge-coupled device (CCD) is the key component of imaging system. The point spread function (PSF) of CCD device is an important part of the whole imaging system PSF. The back-entrance and partial-depletion CCD are used to analyze the carrier’s movement in the CCD. The analytical formula for calculating the PSF of the CCD is deduced. The physical modeling of the CCD was carried out, the PSF was obtained by Monte Carlo method for particle tracking simulation, and the PSF was well consistent with the calculated PSF. The system analyzes and calculates the main characteristic parameters of CCD, such as responsivity, linearity and modulation transfer function (MTF). The influence of the wavelength of incident light and the width of CCD free layer on the PSF of the CCD was simulated. The results show that the narrower free layer width and long wave are easier to obtain better PSF.