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为提高激光诱导击穿光谱(LIBS)仪对不同型号部件的兼容性,优化LIBS仪参数和测试流程,研制了一种模块式的自动化LIBS测控系统。实际测试表明,研制的测控系统可以兼容市场上大部分类型的LIBS部件,提升了LIBS仪对不同部件的兼容性及自身的灵活性,其中光谱仪、激光器等核心部件已测试兼容至少3种不同型号的部件。此外,设计多层迭代式自动化测试流程,提高了LIBS仪参数优化过程的效率。在延时时间的优化测试中,延时时间的优化范围为1.28~18.28μs,步进值分别为1.0、0.5、0.2和0.1μs时,与手动测试平台相比,测试效率分别提升了2.81、3.15、3.72和4.15倍。
In order to improve the compatibility of laser-induced breakdown spectroscopy (LIBS) instrument to different types of components and optimize the LIBS instrument parameters and test flow, a modular automatic LIBS measurement and control system was developed. The actual test shows that the developed measurement and control system can be compatible with most types of LIBS components in the market, which enhances the compatibility of LIBS with different components and their own flexibility. The core components such as spectrometer and laser have been tested and compatible with at least 3 different models Parts. In addition, the design of a multi-layer iterative automated testing process improves the efficiency of the LIBS instrument parameter optimization process. In the optimization test of delay time, the optimization range of delay time is 1.28 ~ 18.28μs. When the step values are 1.0, 0.5, 0.2 and 0.1μs, respectively, compared with the manual test platform, the test efficiency is improved by 2.81, 3.15, 3.72 and 4.15 times.