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一、引言分子束-表面散射装置是研究气体分子与表面相互作用的重要手段,也是表面分析的方法之一。该装置由两大部分组成。一是在进气压强为133～13300帕的条件下,为保证得到高强度超声速的分子束而采用差分抽气系统组成的分子束源部分;二是在进行反应散射、弹性散射及非弹性散射实验时所需的超高真空系统。该系统是由无油超高真空机组及升华钛泵超高真空分析室组成。本文阐述了全套装置系统的匹配问题。
I. INTRODUCTION The molecular beam-surface scattering device is an important method to study the interaction between gas molecules and the surface and is also one of the methods of surface analysis. The device consists of two parts. First, under the condition of inlet pressure of 133 ~ 13300 Pa, the molecular beam source part of the differential pumping system is used to ensure the high-intensity supersonic molecular beam. Second, the reaction of scattering, elastic scattering and inelastic scattering Ultra-high vacuum system required for the experiment. The system is composed of oil-free ultra-high vacuum unit and sublimation titanium pump ultra-high vacuum analysis room. This article describes the matching of a complete system of devices.