X射线光电子能谱仪是近十几年发展起来的一种表面分析仪器,它主要是利用MgKα或Alka的特征X射线来激发样品,测量被激发出来的电子的动能分布。此外,还能探测到结合能的微小化学位移及其化学态之间的关系。所以,X射线光电子能谱仪是表面物理、表面化学、固体物理、半导体、催 X-ray photoelectron spectroscopy is a surface analysis instrument developed in recent ten years. It mainly uses the characteristic X-ray of MgKα or Alka to excite the sample and measure the kinetic energy distribution of the excited electrons. In addition, small chemical shifts of binding energy and their chemical relationships can also be detected. Therefore, X-ray photoelectron spectroscopy is surface physics, surface chemistry, solid state physics, semiconductors,