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漏气率是磁流体真空动密封组件的关键技术指标。本文描述了磁流体真空动密封组件的结构、检漏系统以及氦质谱仪充气检漏方法。文中给出了测试结果。
Leakage rate is the magnetic fluid vacuum sealing components of the key technical indicators. This article describes the structure of the magnetic fluid vacuum seal assembly, the leak detection system, and the helium mass spectrometer inflation leak detection method. The paper gives the test results.