本文介绍用弹性反冲分析技术分析了对二甲苯吸附剂中的氢含量。首先测定已知氢含量的Mylar膜的原子比,实验结果与预期值一致。实验中用Kapton膜作为标样,测定了各种工艺条件的吸附剂中的氢含量,为实际使用提供了依据。 本方法在E_0=2MeV下,可探测深度范围为0.5μm左右,深度分辨率约为700A,灵敏度为0.1％原子数。 This article describes the analysis of hydrogen content in p-xylene sorbents using the elastic recoil analysis technique. First determine the hydrogen content of the Mylar film atomic ratio, the experimental results consistent with the expected value. In the experiment, Kapton membrane was used as a standard sample to determine the hydrogen content in the adsorbents under various process conditions, which provided the basis for practical use. Under the condition of E0 = 2MeV, this method can detect the depth of about 0.5μm, the depth resolution of about 700A, the sensitivity of 0.1% atomic number.