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针对传统的机械式共焦扫描方法由于受机械特性或驱动技术的限制难以满足材料内部物理过程检测、缓慢化学反应可视化和活体细胞成像等应用领域的需求,深入研究了基于纯相位液晶空间光调制器(LCSLM)的聚焦光斑三维位置控制技术,利用LCSLM对入射光进行相位与振幅的同时调制,设计了无机械运动部件的三维共焦扫描系统,实现了显微物镜聚焦光斑的三维扫描。研究结果表明,利用LCSLM能够实现最大横向偏转角度为0.021rad,光束偏转的绝对误差|θerror|<3.30×10-8 rad≈1.89×10-6,且能够实现轴向[-55.6mm,55.6mm]的扫描范围。
Since the traditional mechanical confocal scanning method is difficult to meet the needs of applications such as physical process detection, slow chemical reaction visualization and living cell imaging due to the limitation of mechanical characteristics or driving technology, the research on the application of pure phase liquid crystal spatial light modulation (LCSLM). The LCSLM was used to modulate the phase and amplitude of the incident light simultaneously. A three-dimensional confocal scanning system without mechanical moving parts was designed to realize the 3D scanning of the focused spot of the microscope objective. The results show that LCSLM can achieve the maximum lateral deflection angle of 0.021rad, the absolute error of the beam deflection | θerror | <3.30 × 10-8 rad≈1.89 × 10-6, and the axial [-55.6mm, 55.6mm ] Of the scan range.