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研制了一种与光学显微镜结合并配置 CCD 监视器的原子力显微镜,可同时获得样品的原子力显微镜图象及光学图象.已能分辨出5纳米的精细结构,最大扫描范围可达2μm.文中给出了本仪器获得的一些样品图象结果.
An atomic force microscopy combined with an optical microscope and equipped with a CCD monitor was developed to obtain both AFM images and optical images of the sample. The fine structure of 5 nm has been resolved with a maximum scan range up to 2 μm. Out of the sample obtained by the instrument image results.