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用150W连续CO_2激光器为光源,以SiH_4气体为主原料,合成了超微Si、Si_3N_4、SiC粉末。研究了反应条件对超微粉性能的影响,并探索用廉价的原料代替SiH_4的可能性。该研究具有很好的工业应用前景。
Using 150W continuous CO 2 laser as the light source and SiH 4 gas as the main raw material, ultra-fine Si, Si 3 N 4 and SiC powders were synthesized. The influence of reaction conditions on the performance of ultrafine powders was investigated and the possibility of replacing SiH4 with cheap starting materials was explored. The study has good industrial application prospects.