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利用MEVVA磁过滤等离子沉积技术制备了纳米厚度的Fe颗粒薄膜,并利用原子力显微镜和场发射扫描电子显微镜对其结构进行了系统分析。分析结果表明,由于磁过滤的作用,所制备的Fe纳米薄膜结构均匀,不存在由于电弧蒸发引起的大颗粒沉积现象。等离子体不同沉积角度直接影响纳米薄膜的微观结构,随着沉积角度从90°下降到30°,纳米薄膜的结构由起伏变化的纳米聚晶结构逐渐转变为尺度和表面分布均匀的纳米晶结构。经过高温热处理,相比于垂直沉积的纳米薄膜,30°倾斜沉积制备的薄膜微观结构中大晶粒的数量显著下降,形成颗粒分布较好的纳米颗粒薄膜。
The nano-thickness Fe particle films were prepared by MEVVA magnetic filtration plasma deposition technique. Their structures were systematically analyzed by atomic force microscopy and field emission scanning electron microscopy. The analysis results show that due to the effect of magnetic filtration, the prepared Fe nanostructures have a uniform structure and no large particle deposition due to arc evaporation. The deposition angle of the plasma directly affects the microstructure of the nanofilm. With the deposition angle decreasing from 90 ° to 30 °, the structure of the nanofilm gradually changes from undulating nanocrystalline structure to nanocrystalline structure with uniform scale and surface distribution. After high-temperature heat treatment, the number of large grains in the microstructure of the film prepared by 30 ° oblique deposition significantly decreased compared with that of the vertically deposited nano-film, so that a nano-particle film with better particle distribution was formed.