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对均匀二元合金的表面进行机械清洁处理,得到元素深度分布为已知的试样,并对这样的试样做了离子剥离逐层分析.试验结果表明,Auger-离子剥离逐层分析得到的元素分布不能精确地反映元素的真实分布.除因选择性剥离造成的稳定态浓度偏离体浓度外,有时还在近表面处出现一个元素“贫乏层”(或富集层).本文也对引起逐层分析曲线“失真”的原因及用这种方法做逐层分析时应注意的问题做了简单说明.
The surface of the uniform binary alloy was mechanically cleaned to obtain the samples with known depth of the elements and ion-delamination layer-by-layer analysis of such samples.The experimental results show that Auger-ion stripping layer by layer analysis The elemental distribution does not accurately reflect the true distribution of the element, except that the steady state concentration caused by the selective delamination deviates from the body concentration, and sometimes an element “lean layer” (or enriched layer) appears at the near surface. Analyze the causes of curve “distortion” layer by layer and briefly explain the problems that should be noticed when using this method to do layer by layer analysis.