据报导,最近采用的能在高达25个大气压下工作的高压低温水汽氧化系统可代替各种普通的扩散炉。不象较早的HiPOx氢氧氧化系统那样,新的系统采用直接向氧化装置输入去离子水的方法。由于使用了去离子水,高压氧化的工作温度范围比较宽。而且较低的工作温度得到了如下结果:几乎没有晶格缺陷,没有纵向和横向的扩散以及石英管的失透现象。 It has been reported recently that high pressure, low temperature water vapor oxidation systems that can operate up to 25 atmospheres can replace various conventional diffusion furnaces. Unlike the older HiPOx hydroxide systems, the new system uses a method of directly feeding deionized water to the oxidation unit. Due to the use of deionized water, high-pressure oxidation of the operating temperature range is relatively wide. And the lower operating temperature results in the following: almost no lattice defects, no vertical and horizontal diffusion, and devitrification of quartz tubes.