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《微纳电子技术》于2002年创刊(月刊),在短短的几年里,已成为中文核心期刊、中国科技核心期刊,并被国内外多家知名数据库收录。栏目分为:技术论坛,器件与技术,材料与结构,MEMS与传感器,加工、测量与设备,国际视点。主要内容包括:纳电子学、微系统与纳系统、纳电子器件与技术、纳米材料与结构、功能材料与新材料、纳米测试与显微技术、MEMS与传感器、微细加工技术与设备、纳米技术应用等领域国内外的最新进展,并兼顾微电子领域的最新研究成果。
Micro-nano Electronic Technology was first published in 2002 (monthly). In just a few years, Micro-nano Electronic Technology has become the core journals of Chinese science and technology and the core journals of science and technology in China. It is also included in many well-known domestic and foreign databases. The columns are divided into: technical forums, devices and technologies, materials and structures, MEMS and sensors, processing, measurement and equipment, international perspectives. The main contents include: nanoelectronics, microsystems and systems, nanoelectronic devices and technologies, nanomaterials and structures, functional materials and new materials, nano-testing and microscopy, MEMS and sensors, micro-processing technology and equipment, nanotechnology Applications and other fields both at home and abroad, and take into account the latest research results in the field of microelectronics.