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采用数据回归方法,建立了不同叶片倾角、节弦比条件下单级涡轮叶片正反向传输几率与速度比的数学关系式,通过计算机编程可直接获得单级涡轮叶片的正反向传输几率,进而求出涡轮叶片的抽气性能,提高了计算效率。分别采用涡轮叶片几何中值参数计算方法、沿涡轮叶片齿长逐段积分方法,对单级涡轮叶片和涡轮分子泵的抽气性能进行了计算,并与实验结果进行了对比。发现:采用涡轮叶片几何中值参数计算涡轮叶片抽气性能存在误差,对涡轮分子泵抽气性能的计算值偏高,其计算误差远大于分段积分法的计算误差,后者更适用于对分子泵抽气性能的设计计算。
The mathematical relationship between the forward and reverse transmission probability and speed ratio of single-stage turbine blades under different blade pitch angles and pitch-to-sine ratios was established by using data regression method. The probability of forward and reverse transmission of single-stage turbine blades can be directly obtained through computer programming, Further, the extraction performance of the turbine blade is obtained and the calculation efficiency is improved. The geometric median parameters of turbine blades are used respectively to calculate the exhaust performance of single-stage turbine blades and turbo-molecular pumps along the length of turbine blade. The results are compared with the experimental results. It is found that there are errors in the calculation of turbine blade suction performance using turbine blade geometric median parameters and high calculation value of the pumping performance of turbine molecular pump. The calculation error is much larger than the calculation error of the segment integral method. The latter is more suitable for Design and Calculation of Molecular Pump Pumping Performance.