在玻璃衬底上,采用溶胶-凝胶法制备Na、Mg共掺杂的ZnO薄膜,Mg含量不变,改变Na的掺杂含量,研究掺杂浓度、退火温度及镀膜层数对薄膜结构和光学性能的影响。结果表明:薄膜形貌在550℃退火时较好;Na离子含量会影响薄膜(002)晶面的生长;镀膜层数增加,薄膜有明显红移现象并且透光率会降低。 Na, Mg co-doped ZnO thin films were prepared by sol-gel method on glass substrates. The content of Mg was the same and the content of Na was changed. The effects of doping concentration, annealing temperature and coating number on the structure and Optical performance effects. The results show that the morphology of the film is better when annealed at 550 ℃. The content of Na ion affects the growth of the (002) crystal plane. The number of coating increases, the film shows a red shift phenomenon and the transmittance decreases.