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介绍了一种新型表面改性技术——离子束增强沉积技术的原理、方法,综述了该技术在制备优良抗蚀膜层方面的优势及最新研究进展。
A new surface modification technique, the principle and method of ion beam enhanced deposition, is introduced. The advantages and recent research progress of this technique in preparation of excellent resist layers are reviewed.