论文部分内容阅读
采用改进的溶胶-凝胶方法在LaNiO_3/Si(100)衬底上制备了MgO/(Ba_(0·8)Sr_(0·2))TiO_3多层薄膜.实验结果表明,MgO层的引入改变了(Ba_(0·8)Sr_(0·2))TiO_3的介电特性和漏电流行为,使薄膜的漏电流降低了3个数量级,但介电常数也有相应降低.漏电流的显著降低是由MgO子层的高阻特性以及微量Mg向(Ba_(0·8)Sr_(0·2))TiO_3晶格中扩散造成的.
MgO / (Ba_ (0.8) Sr_ (0.2)) TiO_3 multilayer thin films were prepared on LaNiO_3 / Si (100) substrates by an improved sol-gel method.The experimental results show that the introduction of MgO layers changes The dielectric properties and leakage current behavior of (Ba_ (0.8) Sr_ (0.2)) TiO_3 decrease the leakage current of the films by three orders of magnitude, but also decrease the dielectric constant. The significant reduction of leakage current is It is caused by the high resistance of the MgO sublayer and the diffusion of trace Mg into the (Ba_ (0.8) Sr_ (0.2)) TiO_3 lattice.