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利用Monte Carlo(M C)模型研究了薄膜生长的初始阶段岛的形貌和岛的尺寸与基底温度之间的关系 .模型中考虑了原子沉积、吸附原子扩散和蒸发等过程 ,与以前模型不同的是我们用Morse势计算粒子之间的相互作用 ,并详细考虑了临近和次临近原子的影响 .结果表明 ,随基底温度的升高 ,岛的形貌经历了一个从分形生长到凝聚生长的变化过程 .进一步研究表明 ,岛的形貌与基底的形貌之间的关系随着基底温度的升高有很大的变化 ,基底温度低时 ,岛的形状与基底形貌无关 ,高温时岛具有与基底形貌相似的结构 .这些结果与实验结果一致 .为了进一步说明岛的生长与基底温度之间的关系 ,还计算了岛的平均尺寸随基底温度的变化 ,结果很明显 ,岛的平均尺寸随基底温度的升高而降低 .发现在岛的生长过程中存在一个从分形岛生长到凝聚生长的转变温度区 .
Monte Carlo (MC) model was used to study the relationship between island morphology and island size and substrate temperature at the initial stage of film growth.The atom deposition, adsorption atom diffusion and evaporation processes were considered in the model. Unlike the previous models We use the Morse potential to calculate the interaction between particles and consider in detail the effects of neighboring and neighboring atoms.The results show that the morphology of the island undergoes a change from fractal to cohesive growth as the substrate temperature increases Further studies have shown that the relationship between the island morphology and the substrate morphology changes greatly with the increase of the substrate temperature and the shape of the island has nothing to do with the substrate morphology when the substrate temperature is low. These results are in agreement with the experimental results.In order to further illustrate the relationship between the island growth and the substrate temperature, the average size of the islands is also calculated as a function of substrate temperature, and the results are clear that the average island size With the increase of the substrate temperature, it is found that there exists a transition temperature region from the fractal island to the cohesive growth during the growth of the island.