靶面焦斑合束数值模拟研究可为准分子激光角多路系统建设提供重要参考。首先介绍了靶面激光焦斑合束的计算方法,进而基于单束激光焦斑形态和光束指向稳定性开展了18束准分子激光靶面合束计算,给出了合束焦斑的形态及评价参数。最后,基于准等熵压缩实验的要求,研究了不同系统成像质量对激光指向稳定性的要求。研究表明:多束激光焦斑合束有利于提高焦斑均匀性;高系统成像质量需要较高的光束指向稳定性来保证合束焦斑的均匀性,否则高系统成像质量的优势得不到体现;系统成像质量较差时,光束指向稳定性处于一定范围内即可,更高的激光指向稳定性对焦斑的均匀性改善不显著。 The research on the numerical simulation of the focal spot co-beam can provide important reference for the construction of the multi-path laser system. Firstly, the calculation method of the laser focal spot co-beam of the target surface is introduced. Then, the calculation of the etendue of 18 excimer laser target surfaces is carried out based on the single laser spot morphology and the beam stability. Evaluation parameters. Finally, based on the requirements of quasi-isentropic compression experiments, the requirements for the laser pointing stability of different system imaging quality are studied. The research shows that the multi-beam laser co-beam co-beam is helpful to improve the uniformity of the coke spot. The high system imaging quality requires high beam pointing stability to ensure the uniformity of the coke beam spot, otherwise the advantage of high system imaging quality can not be obtained Reflecting the poor imaging quality, the beam pointing stability can be within a certain range, and the higher laser pointing stability has no significant improvement on the uniformity of the focal spot.