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研究了水热处理对于SnO2厚膜气敏传感器性能的影响。为了便于作对比,首先把SnO2纳米粉(平均粒径约200nm)平均分为两份:一份不经处理,直接用传统的厚膜传感器制备工艺制成气敏传感器(称为“原粉传感器”);另一份经过200℃水热处理后,用同样的工艺制备成厚膜气敏传感器(称为“预处理粉传感器”)。利用乙醇、丙酮、CH4、H2和CO气体对这两种气敏传感器的性能进行了测试,结果表明预处理粉传感器的灵敏度和选择性明显优于原粉传感器。为了分析出现这种差异的原因,我们对这两种传感器的显微结构进行了分析,并在此基础上对实验现象进行了讨论。
The effect of hydrothermal treatment on the performance of SnO2 thick film gas sensor was studied. In order to facilitate comparison, the first SnO2 nano-powder (average particle size of about 200nm) divided equally into two: one without processing, directly using the traditional thick film sensor preparation process made of gas sensor (called the “original powder sensor ”); The other after 200 ℃ hydrothermal treatment, using the same process to prepare a thick film gas sensor (known as“ pretreatment powder sensor ”). The performance of these two kinds of gas sensors was tested with ethanol, acetone, CH4, H2 and CO gas. The results show that the sensitivity and selectivity of the pretreatment powder sensor are obviously superior to those of the original powder sensor. To analyze the causes of this discrepancy, we analyzed the microstructures of the two sensors and discussed the experimental phenomena on this basis.