The effect of phosphorus on the oxidation resistance of low thermal expansion alloy IN909 was studied. The composition and structure of the oxidation layer were analyzed. It is found that the oxidation initiates at the grain boundaries. During the oxidation, Fe atoms diffuse toward the surface and form the outside oxidation layer as the oxide of iron. The transition oxidation layer lies between the oxidation layer and the matrix which is enriched with Nb, Ti and Si, forming FeTiO5, Nb2O5, Fe2SiO4 and TiO2. Phosphorus hardly influences the thermal expansion coefficient of IN909 alloy. However, it increases the formation of ε phase at the boundary of the transition oxidation layer and matrix. As a result, the oxidation rate is decreased efficiently because the ε phase inhibits the diffusion of the element such as iron from the matrix to the oxidation layer.