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三、声表面波电压传感器在声表面波延迟线的输入和输出换能器间的传播途径压电基片上,施加偏置电场,引起弹性形变,产生改变了延迟时间的效应.利用这种效应于电压测试技术开发了声表面波电压传感器.这种当电场施加于压电材料时,所感应产生的弹性形变S以张量形式给出如下公式:S_(ij)=d(ijk)×E_k i,j=x,y,z (6)式中,d_(ijk)是在K方向施加电场E_k时在i平面上沿j方向的压电常数.图12给出了SAW延迟线被施加偏置电场的示意图.如式(6)所示,电场感应产生弹性形变是基本工作原理,而对于电压传感器有效的弹性形变量为S_(xx)或S_(yy),给出常用的三种材料:PCM压电陶瓷,
Third, the SAW voltage sensor in the SAW delay line input and output transducers between the transmission path Piezoelectric substrate, the application of bias electric field, causing elastic deformation, resulting in changes in the delay time effect.This effect The surface acoustic wave voltage sensor has been developed by the voltage testing technique, and when the electric field is applied to the piezoelectric material, the induced elastic deformation S is given by the following formula in the form of a tensor: S_ (ij) = d (ijk) × E_k (6) where d_ (ijk) is the piezoelectric constant along the i-plane along the j-axis when an electric field E_k is applied in the K direction. Figure 12 shows that the SAW delay line is biased As shown in Eq. (6), the elastic deformation of the electric field is the basic working principle, while the effective elastic deformation of the voltage sensor is S_ (xx) or S_ (yy), and the commonly used three kinds of materials : PCM piezoelectric ceramics,