Hybrid plasmon waveguides, respectively, with metamaterial substrate and dielectric substrate are investigated and analyzed contrastively with a numerical finite element method. Basic properties, including propagation length Lp, effective mode area Aeff, and energy distribution, are obtained and compared with waveguide geometric parameters at 1.55 μm. For the waveguide with metamaterial substrate, propagation length Lp increases to several tens of microns and effective mode area Aeffis reduced by more than 3 times. Moreover, the near field region is expanded, leading to potential applications in nanophotonics. Therefore, it could be very helpful for improving the integration density in optical chips and developing functional components on a nanometer scale for all optical integrated circuits. Hybrid plasmon waveguides, respectively, with metamaterial substrate and dielectric substrate are investigated and analyzed contrastively with a numerical finite element method. Basic properties, including propagation length Lp, effective mode area Aeff, and energy distribution, are obtained and compared with waveguide geometric parameters at 1.55 μm. For the waveguide with metamaterial substrate, propagation length Lp increases to several tens of microns and effective mode area Aeffis reduced by more than 3 times. Thus, it is near to potential applications in nanophotonics. Therefore, it could be very helpful for improving the integration density in optical chips and developing functional components on a nanometer scale for all optical integrated circuits.