论文部分内容阅读
基于压电驱动器的Bimorph变形镜是10.6μm系统的一个重要元件。为了镀制薄膜,本文首先利用有限元软件对两种镀膜夹持方式与沉积温度进行了计算,对热应力产生的热变形进行了分析,选择了合适的镀膜夹持方式。为了预测bimorph变形镜受激光辐照后的温升,对单晶硅与石英玻璃制作的bimorph变形镜有限元模型进行了计算与分析。最后,利用光度计对镀制的薄膜进行了反射率测量。试验结果显示反射率测量值大于99.5%,满足实际系统的需要。
Piezoelectric actuators based Bimorph deformable mirrors are an important component of a 10.6μm system. In order to make the thin film, the paper first uses the finite element software to calculate the two kinds of coating clamping method and deposition temperature, analyzes the thermal deformation caused by the thermal stress, chooses the suitable coating clamping method. In order to predict the temperature rise of bimorph deformable mirror after laser irradiation, the finite element model of bimorph deformable mirror made of monocrystalline silicon and quartz glass was calculated and analyzed. Finally, the reflectance of the film was measured by photometer. The test results show that the reflectance measurement is greater than 99.5% to meet the needs of the actual system.